Sensor Properties of Bilayer Structures with Palladium, Lead and Cobalt Phthalocyanines in Surface Acoustic Wave and Electric Systems
نویسنده
چکیده
Presented here are the results concerning a hydrogen sensor based on a novel bilayer structure with lead and cobalt phthalocyanines in a Surface Acoustic Wave dual-delay line and electric systems. The sensor material consists of two layers produced in two different vapour deposition processes. The first one is a lead or cobalt phthalocyanine (~310nm PbPc or 200nm CoPc) layer, whereas the second is a ~20 nm thin palladium (Pd) film. This structure was simultaneously formed in a one of the SAW dual delay lines and on the interdigital electrodes of the glass substrate for electric measurements. These sensor structures have been investigated from the point of view their sensitivity towards: hydrogen, nitrogen dioxide and sulphur dioxide gases with different concentrations in dry air. Preliminary measurements of this two bilayer structures have been performed simultaneously in the same chamber for this same measurement conditions.
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